Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Laser & Optoelectronics Progress, Volume. 56, Issue 16, 163201(2019)

Fabrication of Silicon Micro/Nanostructures Based on Laser Interference Ablation

Zihan Wang1, Baoxu Wang1, Masaru Kamano2, and Weiwei Xu2、*
Author Affiliations
  • 1 State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, Jilin 130012, China
  • 2 National Institute of Technology, Anan College, Anan, 7740017, Japan
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (6)
    Equations (0)
    References (20)
    Cited By (2)
    Tools
    Paper Information
    Topics
    Cited By

    Article index updated: Sep. 7, 2025

    The article is cited by 2 article(s) CLP online library. (Some content might be in Chinese.)
    Tools

    Get Citation

    Copy Citation Text

    Zihan Wang, Baoxu Wang, Masaru Kamano, Weiwei Xu. Fabrication of Silicon Micro/Nanostructures Based on Laser Interference Ablation[J]. Laser & Optoelectronics Progress, 2019, 56(16): 163201

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Ultrafast Optics

    Received: Feb. 14, 2019

    Accepted: Mar. 27, 2019

    Published Online: Aug. 5, 2019

    The Author Email: Weiwei Xu (xu0611318weiwei@163.com)

    DOI:10.3788/LOP56.163201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology