Chinese Journal of Lasers, Volume. 9, Issue 8, 520(1982)

An ArF excimer laser at 193 nm

Shangguan Cheng, Yuan Cailai, Te Chao, and Dou Airong
Author Affiliations
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    References(11)

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    CLP Journals

    [1] Lin Yan, Huo Yujing, He Shufang. Deep Ultraviolet Solid-State Laser System[J]. Chinese Journal of Lasers, 2009, 36(7): 1826

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    Shangguan Cheng, Yuan Cailai, Te Chao, Dou Airong. An ArF excimer laser at 193 nm[J]. Chinese Journal of Lasers, 1982, 9(8): 520

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    Paper Information

    Category: laser devices and laser physics

    Received: Jun. 26, 1981

    Accepted: --

    Published Online: Aug. 23, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

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