[1] Dörband B, Seitz G. Interferometric testing of optical surfaces at its current limit[J]. Optik, 112, 392-398(2001).

[2] Yang L[M]. Modern optical manufacturing engineering(2009).

[3] Hou X, Zhang S, Hu X C et al. The research progress of surface interferometric measurement with higher accuracy[J]. Opto-Electronic Engineering, 47, 18-30(2020).

[4] Tan Y D, Xu X, Zhang S L. Precision measurement and applications of laser interferometry[J]. Chinese Journal of Lasers, 48, 1504001(2021).

[5] Evans C J, Hocken R J, Estler W T. Self-calibration: reversal, redundancy, error separation, and ‘absolute testing’[J]. CIRP Annals, 45, 617-634(1996).

[6] Zhu X L, Nie F M, Liu B C et al. Multiposition rotation interference absolute measurement method for high-precision optical component surfaces[J]. International Journal of Optics, 2021, 6621939(2021).

[7] Yan L S, Li F Z, Wang X K et al. Method for absolute measurement of flat surface[J]. Applied Optics, 59, 10584-10590(2020).

[8] Xu C, Chen L. Absolute flatness measurement of optical surfaces[J]. Optical Technique, 32, 775-778(2006).

[9] Zhou Y, Liu S J, Lu Q et al. In situ absolute surface metrology for a 600 mm aperture interferometer[J]. Optics and Lasers in Engineering, 129, 106054(2020).

[10] Zhang Y W, Su D Q, Sui Y X et al. Absolute testing of rotationally asymmetric surface deviation with the method of rotation-averaging and compensation[J]. Chinese Journal of Lasers, 41, 0708007(2014).

[11] Shen F F, Tian A L, Wang D S et al. Correction of eccentricity error in absolute flat surface testing by shift-rotation method[J]. Laser & Optoelectronics Progress, 58, 1912001(2021).

[12] Keenan P B. Pseudo-shear interferometry[J]. Proceedings of SPIE, 0429, 2-7(1983).

[13] Morin F, Bouillet S. Absolute interferometric measurement of flatness: application of different methods to test a 600 mm diameter reference flat[J]. Proceedings of SPIE, 6616, 66164G(2007).

[14] Bloemhof E E. Absolute surface metrology with a phase-shifting interferometer for incommensurate transverse spatial shifts[J]. Applied Optics, 53, 792-797(2014).

[15] Cai H J[D]. Study of key technologies of absolute measurement of optical plane shape based on conjugate difference method, 34-45(2015).

[16] Huang Y, Ma J, Zhu R H et al. Absolute measurement of optical flat surface shape based on the conjugate differential method[J]. Optics Express, 23, 29687-29697(2015).

[17] Gladysheva Y V, Zhivotovskii I V, Denisov D G et al. A profile-recovery algorithm for a high-accuracy optical flat[J]. Measurement Techniques, 59, 142-148(2016).

[18] Zhang R[D]. Research on key parameters and application of wavefront metrology based on the randomly encoded hybrid grating lateral shearing interferometry, 45-47(2020).

[19] Li J, Tian A L, Wang D S et al. A random two-step phase shift algorithm based on polynomial fitting background light[J]. Laser & Optoelectronics Progress, 58, 1112008(2021).

[20] Wang R D, Tian W, Wang P et al. Analysis of vibration effect to surface figure measurement[J]. Acta Optica Sinica, 32, 1112001(2012).

[21] Wen G, Su D Q, Su Z D et al. Analysis of random errors in high precision wavelength phase shifting interferometers by numerical simulation[J]. Chinese Journal of Lasers, 40, 1008003(2013).

[22] Lu W Q, Li J X, Duan M L et al. Anti-vibration interferometric shape measurement based on tilt phase[J]. Acta Optica Sinica, 41, 0212005(2021).