Chinese Journal of Lasers, Volume. 49, Issue 18, 1804003(2022)
Translation of Surface Shape Absolute Testing Based on Reverse Optimization Strategy
Figures & Tables(15)
Fig. 1. Schematic of measurement principle of conjugate translation difference method
Fig. 2. Surface shape of initial reference surface and measured surface. (a) Reference surface shape; (b) measured surface shape
Fig. 4. Relationship between translation and surface reconstruction error under different noise
Fig. 5. Distributions of measured mirrors surface shape. (a) B1 surface shape; (b) B2 surface shape; (c) C1 surface shape; (d) C2 surface shape
Fig. 6. Influence of translation on measurement error when surface accuracy is different
Fig. 7. Standard mirror shape parameters. (a) ZYGO standard mirror; (b) standard mirror shape parameters
Fig. 9. Interference wavefront diagrams after 2 mm translation in x and y directions, respectively.(a) －x direction; (b) ＋x direction; (c) －y direction; (d) ＋y direction
Fig. 10. Reconstructed surface shape of measured surface under each translation. (a) s＝2 mm; (b) s＝6 mm; (c) s＝0.2 mm；(d) s＝10 mm
Fig. 11. Comparison of experimental section line between conjugate translation difference method and three-sided mutual detection method under different translation quantities. (a) s＝2 mm; (b) s＝6 mm; (c) s＝0.2 mm; (d) s＝10 mm
Table 1. Optimal translation interval under under interference with different random noise values
View tableTable 1. Optimal translation interval under under interference with different random noise values
Random noise RMS /nm Optimal translation interval /mm η 1～N(0，2)0.6－4.8 η 2～N(0，4)1－4.8 η 3～N(0，6)1.4－4.6 η 4～N(0，8)1.8－4.4 η 5～N(0，10)2.6－4.2
Table 2. The best translation interval corresponding to measured mirror with different surface shape errors
View tableTable 2. The best translation interval corresponding to measured mirror with different surface shape errors
Surface shape error of measured surface (PV value) λ/20 λ/40 λ/60 λ/80 λ/100 Optimal translation interval/mm 0.6－4.6 0.6－6.8 0.6－8.2 0.6－9.2 0.6－9.6
Table 3. Surface shape deviation caused by random noise
View tableTable 3. Surface shape deviation caused by random noise
Measurement group Standard deviation /nm 1 1.92 2 2.10 3 2.28 4 2.53 5 2.01 6 2.40 7 1.86 8 2.22 9 1.75 10 1.63 11 2.16 12 2.23 Average value 2.09
Table 4. Residual error of two methods under different translation
View tableTable 4. Residual error of two methods under different translation
Translation/mm Residual contour error /nm PV20 RMS 0.2 12.07 2.25 2 7.84 1.19 6 8.29 1.36 10 10.78 2.26
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Mengyao Zhang, Ailing Tian, Dasen Wang, Xueliang Zhu, Bingcai Liu, Hongjun Wang. Translation of Surface Shape Absolute Testing Based on Reverse Optimization Strategy[J]. Chinese Journal of Lasers, 2022, 49(18): 1804003
Paper Information
Category: Measurement and metrology
Received: Dec. 7, 2021
Accepted: Jan. 28, 2022
Published Online: Jul. 28, 2022
The Author Email: Tian Ailing (ailintian@xatu.edu.cn)
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