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Laser & Optoelectronics Progress, Volume. 58, Issue 11, 1100003(2021)

Research Progress in Nonlinear Error Compensation Suppression and Measurement of Heterodyne Interferometer

Peng Zhang and Jianjun Cui*
Author Affiliations
  • Institute of Geometric Metrology, National Institute of Metrology, Beijing 100029, China
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    Article index updated: Sep. 7, 2025

    The article is cited by 8 article(s) CLP online library. (Some content might be in Chinese.)
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    Peng Zhang, Jianjun Cui. Research Progress in Nonlinear Error Compensation Suppression and Measurement of Heterodyne Interferometer[J]. Laser & Optoelectronics Progress, 2021, 58(11): 1100003

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    Paper Information

    Category: Reviews

    Received: Sep. 20, 2020

    Accepted: Nov. 5, 2020

    Published Online: Jun. 7, 2021

    The Author Email: Jianjun Cui (ycuijj@163.com)

    DOI:10.3788/LOP202158.1100003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology