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Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 215(2025)

Fabrication Process for Surface Acoustic Wave Filters Using Dual-Patterning Technology

JI Hongyu, GUO Junhan, YU Haiyang, ZHANG Yutao, SHI Xianglong, and MENG Tengfei
Author Affiliations
  • Beijing Aerospace Micro-Electronics Technology CO, LTD, Beijing 100854, China
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    JI Hongyu, GUO Junhan, YU Haiyang, ZHANG Yutao, SHI Xianglong, MENG Tengfei. Fabrication Process for Surface Acoustic Wave Filters Using Dual-Patterning Technology[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 215

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    Paper Information

    Received: Dec. 14, 2024

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.02.003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology