Journal of Synthetic Crystals, Volume. 52, Issue 5, 759(2023)
Grinding Properties of 4H-SiC Single Crystal Substrate Using Polyurethane Pad
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WU Ruiwen, SONG Huaping, YANG Junwei, QU Hongxia, LAI Xiaofang. Grinding Properties of 4H-SiC Single Crystal Substrate Using Polyurethane Pad[J]. Journal of Synthetic Crystals, 2023, 52(5): 759
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Received: Feb. 15, 2023
Accepted: --
Published Online: Jun. 11, 2023
The Author Email: WU Ruiwen (wrwriven@163.com)
CSTR:32186.14.
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