Chinese Journal of Lasers, Volume. 51, Issue 12, 1202406(2024)

Review and Challenges of Photosensitive Materials in Two‑Photon Lithography (Invited)

Yun Dong, Xiangming He, and Hong Xu*
Author Affiliations
  • Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing 100084, China
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    Figures & Tables(32)
    Absorption of light by matter[21]
    Schematic diagram of two-photon lithography process[36]
    Comparison of one-photon absorption resolution and two-photon absorption resolution[38]
    Comparison of spatial selectivity[36]. (a) One-photon lithography; (b) two-photon lithography
    None extended-π system[44], D-π-A type[45-46], D-π-D type[47], D-π-A-π-D type[48-49], and A-π-D-π-A type[50-51] free radical initiators
    D-π-A type[54], D-π-D type[55], A-π-A type[56], and D-π-A-π-D type[57] photoacids
    Acrylate/methacrylate based polymerisation monomers[59-60]
    Thiol polymeric monomers for thiol-alkene/alkyne reaction[60-61]
    Alkene/alkyne monomers for thiol-alkene/alkyne reaction[60-62]
    Comparison of PTTA self-polymerisation and polymerisation of PTTA and PETMP via thiol-olefin reaction[63]
    Photolithography pattern of thiol-olefin photoresist[63]. (a) Repeatability test of line graphics; (b) square bench support structure
    Schematic diagram of hydrogel cross-linking to form three-dimensional structure[64]. (a) Cross-linked cured material system of PEGDA hydrogel; (b) scanning electron microscope (SEM) image of hydrogel microstructure
    Schematic of microstructure formation by two-photon cross-linking of P(DMAA-AAHAQ)[66]
    Schematic diagram of cationic polymerization mechanism of epoxy resin[69]. (a) Generation of Bronsted acid from two-photon initiator; (b) Bronsted acid initiate cationic polymerization of epoxy monomer
    Epoxy resin polymerisation monomers[69]
    Three-dimensional frameworks of alumina-coated polymer skeletons with different structures[72]
    Polymer scaffold assisted fabrication of three-dimensional Al2O3 structure[73]. (a) Two-photon lithography to construct polymer skeleton; (b) atomic layer deposition; (c) skeleton after milling two sides with focused ion beam; (d) oxygen plasma etching to remove polymer skeleton
    8 trussed three-dimensional stereoscopic nanolattice of Al2O3[73]. (a) Overall structure; (b) enlarged cross-section, inset shows isolated hollow tube
    Schematic diagram of process for fabricating three-dimensional structures from SiO2 nanocomposites[75]. (a) Three-dimensional structure obtained by two-photon polymerisation; (b) 600 ℃ heat treatment to remove polymer components; (c) 1300 ℃ sintering to obtain pure quartz 3D structure
    Schematic diagram of process for fabricating three-dimensional structures from half-siloxane composites[76]
    Silica nanostructures fabricated by POSS resin[76]. (a) Woodpile photonic crystal; (b) top-view close-up of line pattern with line width of 97 nm wide
    Schematic diagram of process for fabricating three-dimensional structure from ZnO composites[77]. (a) Formulation of organic photoresist containing zinc ions; (b) three-dimensional structure of zinc-containing polymer obtained by two-photon lithography; (c) 500 ℃ sintering to remove organic components and obtain pure zinc oxide ceramic structure
    Schematic diagram of process for preparation of three-dimensional structure from nickel acrylate composites[78]. (a) Ligand exchange reaction for preparation of nickel acrylate; (b) preparation of nickel acrylate hybrid photoresist; (c) two-photon lithography; (d) removing organic matter during heat treatment to obtain pure Ni three-dimensional structure
    Copolymerisation mechanism and final hybrid structure of surface functionalised zirconia nanoparticles[81]
    Three-dimensional microfocusing pattern of zirconia ceramic micromesh with period of 0.8 μm[81]
    Reaction mechanism of ZrO2-BTMST photoresist[31]. (a) Photolysis of BTMST initiator; (b) surface ligands of ZrO2 nanoclusters under BTMST cation exchange; (c) aggregation of positively charged ZrO2 nanoclusters with neutral clusters
    Two-photon induced chemical bonding three-dimensional fabrication[83]. (a) Schematic of 3D nanoprinting of CdSe/ZnS quantum dots capped with 3-mercaptopropionic acid; (b) schematic of photon-induced chemical bonding mechanism
    Three-dimensional structures of quantum dot materials with two-photon lithography[83]. (a) Linear 3D structure with scale of 5 μm; (b) curved 3D structure with scale of 5 μm; (c) volumetric structure with scale of 10 μm
    Schematic diagram of azide initiator for nanocrystal photoinduced chemical bonding mechanism[84]
    Schematic of two-photon polymerization within DMOF crystal by femtosecond laser light[87]. (a) Fill DETC and PEGDA into DMOF; (b) two-photon lithograph; (c) develop to wash away unexposed part
    Three-step fabrication of As2S3 three-dimensional photonic crystal[88]. (a) Thermal evaporation of As2S3 to prepare molecular cage of As4S6; (b) ring opening of As4S6 in exposed region to As2S3 under two-photon excitation; (c) designed three-dimensional structure after development
    Three-dimensional structure of As2S3 woodpile[88]. (a) Woodpile with rod spacing of 2 μm, and each rod consists of 8 parallel sub rods with aspect ratio close to 1.0; (b) top view of woodpile with rod spacing of 1 μm; (c) cross-section of focused ion beam of woodpile in Fig. (b); (d) top view of woodpile in Fig. (b)
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    Yun Dong, Xiangming He, Hong Xu. Review and Challenges of Photosensitive Materials in Two‑Photon Lithography (Invited)[J]. Chinese Journal of Lasers, 2024, 51(12): 1202406

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Feb. 20, 2024

    Accepted: Apr. 8, 2024

    Published Online: May. 29, 2024

    The Author Email: Xu Hong (hongxu@tsinghua.edu.cn)

    DOI:10.3788/CJL240602

    CSTR:32183.14.CJL240602

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