Acta Optica Sinica, Volume. 34, Issue s1, 112004(2014)
Study on the Surface Shape Measurement of Planar Element Based on Slope Sensor Method
[1] [1] O Kafri, A Livnat. Reflective surface analysis using moiré deflectometry [J]. Appl Opt, 1981, 20(18): 3098-3100.
[2] [2] Yan Tang, Xianyu Su, Yuankun Liu, et al.. 3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry [J]. Opt Express, 2008, 16(19): 15090-15096.
[3] [3] J Balzer, S Werling. Principles of shape from specular reflection [J]. Measurement, 2010, 43(10): 1305-1317.
[4] [4] Daniel R Neal, James Copland, David Neal. Shack-Hartmann wavefront sensor precision and accuracy [C]. SPIE, 2002, 4779: 148-160.
[5] [5] Peng Su, Yuhao Wang, James H Burge, et al.. Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach [J]. Opt Express, 2012, 20(11): 12393-12406.
[6] [6] Lirong Wang, Peng Su, Robert Parks, et al.. A low-cost, flexible, high dynamic range test for free-form illumination optics [C]. SPIE, 2010, 7652: 76521H.
[7] [7] Margaret Z Dominguez, John Armstrong, Peng Su, et al.. SCOTS: a useful tool for specifying and testing optics in slope space [C]. SPIE, 2012, 8493: 84931D.
[8] [8] P Su, R E Parks, L Wang, et al.. Software configurable optical test system-computerized reverse Hartmann test [J]. Appl Opt, 2010, 49(23): 4405-4412.
[9] [9] M Knauer, J Kaminski, G Hausler. Phase measuring deflectometry: a new a pproach to measure specular free form surfaces [C]. SPIE, 2004 ,5457: 366-376.
[10] [10] Tianquan Su, Won Hyun Park, Robert E Parks, et al.. Scanning long-wave optical test system-a new ground optical surface slope test system [C]. SPIE, 2011, 8126: 81260E.
[11] [11] Su Xianyu, Li Jitao. Information Optics [M]. Beijing: Science Press, 2011. 317-318.
[12] [12] Zhengyou Zhang. A flexible new technique for camera calibration [J]. IEEE Transactions on Pattern Analysis and Machine Intelligence, 2000, 22(11): 1331-1334.
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E Kewei, Li Dahai, Li Mengyang, Zhao Jiwen, Li Shuiyan, Zhang Chong, Dai Zhenqiang, Wang Qionghua. Study on the Surface Shape Measurement of Planar Element Based on Slope Sensor Method[J]. Acta Optica Sinica, 2014, 34(s1): 112004
Category: Instrumentation, Measurement and Metrology
Received: Oct. 23, 2013
Accepted: --
Published Online: Jul. 3, 2014
The Author Email: E Kewei (ekeweia121@sina.com)