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Acta Optica Sinica, Volume. 34, Issue s1, 112004(2014)

Study on the Surface Shape Measurement of Planar Element Based on Slope Sensor Method

E Kewei1、*, Li Dahai1, Li Mengyang1, Zhao Jiwen1, Li Shuiyan1, Zhang Chong1, Dai Zhenqiang1, and Wang Qionghua1,2
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    E Kewei, Li Dahai, Li Mengyang, Zhao Jiwen, Li Shuiyan, Zhang Chong, Dai Zhenqiang, Wang Qionghua. Study on the Surface Shape Measurement of Planar Element Based on Slope Sensor Method[J]. Acta Optica Sinica, 2014, 34(s1): 112004

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Oct. 23, 2013

    Accepted: --

    Published Online: Jul. 3, 2014

    The Author Email: E Kewei (ekeweia121@sina.com)

    DOI:10.3788/aos201434.s112004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology