Degassing method of electronic sensitive CMOS components

Tongtong LI; Chao XIAO; Gangcheng JIAO; Lei YAN; Haibo FAN; Jing MA; Chenglin LI

doi:10.5768/JAO202243.0604019

Journal of Applied Optics, Volume. 43, Issue 6, 1181(2022)

Degassing method of electronic sensitive CMOS components

Tongtong LI^1,2、*, Chao XIAO^1,2, Gangcheng JIAO^1,2, Lei YAN^1,2, Haibo FAN^1,2, Jing MA^1,2, and Chenglin LI^1,2

Author Affiliations

¹Science and Technology on Low-Light-Level Night Vision Laboratory, Xi'an 710065, China

²Kunming Institute of Physics, Kunming 650223, China

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References(3)

[4] [4] NIE Jing. The research of micro-channel plate restrain technology based on vacuum degassing[D]. Xi'an: Xi'an Technological University, 2013.

[8] [8] JIA Xinzhi. Negative electron afinity photocathodes and applications[M]. Beijing: National Defense Industry Press, 2013: 207-224.

[12] [12] ZHANG Huzhong, LI Detian. Residual gas adsorption and desorption in the field emission of titanium-coated carbon nanotubes [J]. Materials,2019, 18(12):2937.

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Tongtong LI, Chao XIAO, Gangcheng JIAO, Lei YAN, Haibo FAN, Jing MA, Chenglin LI. Degassing method of electronic sensitive CMOS components[J]. Journal of Applied Optics, 2022, 43(6): 1181

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Paper Information

Category: Research Articles

Received: Sep. 4, 2022

Accepted: --

Published Online: Nov. 18, 2022

The Author Email:

DOI:10.5768/JAO202243.0604019

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology