Journal of Applied Optics, Volume. 43, Issue 6, 1181(2022)
Degassing method of electronic sensitive CMOS components
Figures & Tables(5)
Fig. 2. Schematic diagram of degassing system for electronic sensitive CMOS component
Fig. 4. Changes of ion flow of four gases at different drying temperatures
Fig. 5. Changes of ion flow of four gases baked at 260 ℃ for 3 days
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Tongtong LI, Chao XIAO, Gangcheng JIAO, Lei YAN, Haibo FAN, Jing MA, Chenglin LI. Degassing method of electronic sensitive CMOS components[J]. Journal of Applied Optics, 2022, 43(6): 1181
Paper Information
Category: Research Articles
Received: Sep. 4, 2022
Accepted: --
Published Online: Nov. 18, 2022
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