Piezoelectrics & Acoustooptics, Volume. 45, Issue 2, 220(2023)

Design and Fabrication of Micro Shell Resonator Gyroscope with High Structure Symmetry

MEI Song1...2,3, YANG Feng1,2,3, WEN Lu1,2,3, LU Yujin1,2,3, HE Yunqi1,2,3, CHEN Chaochun1,2,3, HAN Shichuan1,2,3, LEI Ting1,2,3, and LIN Bingtao1,23 |Show fewer author(s)
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  • 1[in Chinese]
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    References(9)

    [1] [1] CHO J Y.High-performance micromachined vibratory rate-and rate-integrating gyroscopes[D].USA:University of Michigan,2012.

    [2] [2] SENKAL D,AHAMED M J,ASKARI S,et al. 1 million Q-factor demonstrated on micro-glassblown fused silica wineglass resonators with out-of-plane electrostatic transduction[J].IEEE/ASME Journal of Microelectro Mechanical Systems,2014,24(1):29-37

    [3] [3] CHO J Y,YAN J L,JEFFREY A,et al.3-dimensional blow torch-molding of fused silica microstructures[J]. Journal of Micro Electromechanical Systems,2013,22(6): 1276-1284.

    [4] [4] ANUPAM V,LI Tao,YOGESH G.High resolution micro ultrasonic machining for trimming 3D microstructures[J]. Journal of Micromechanics and Microengineering,2014,24(6):065017.

    [5] [5] WANG Yusheng,ASADIAN M H,SHKEL A M. Compensation of frequency split by directional lapping in fused quartz micro wineglass resonators[J]. Journal of Micromechanics and Microengineering,2018,28(9):095001.

    [6] [6] LU Kun,XI Xiang,LI Wei,et al.Research on precise mechanical trimming of a micro shell resonator with T-shape masses using femtosecond laser ablation[J]. Sensors and Actuators A:Physical,2019,290:228-238.

    [7] [7] SENKAL D,AHAMED M J,TRUSOV A A,et al. Demonstration of sub-1 Hz structural symmetry in micro-glassblown wineglass resonators with integrated electrodes[C]//[S.l.]:2013 Transducers & Eurosensors:The 17th International Conference on Solid-State Sensors,Actuators and Microsystems, IEEE,2013:1380-1383.

    [8] [8] DARVISHIAN A.Design and analysis of extremely low-noise MEMS gyroscopes for navigation[D]. USA:University of Michigan,2018.

    [10] [10] BOARD I. IEEE standard specification format guide and test procedure for single-axis interferometric fiber optic gyros[J]. IEEE Std,1998:952-1997.

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    MEI Song, YANG Feng, WEN Lu, LU Yujin, HE Yunqi, CHEN Chaochun, HAN Shichuan, LEI Ting, LIN Bingtao. Design and Fabrication of Micro Shell Resonator Gyroscope with High Structure Symmetry[J]. Piezoelectrics & Acoustooptics, 2023, 45(2): 220

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    Paper Information

    Received: Nov. 10, 2022

    Accepted: --

    Published Online: Nov. 29, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.02.011

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