Design and Fabrication of Micro Shell Resonator Gyroscope with High Structure Symmetry

MEI Song; YANG Feng; WEN Lu; LU Yujin; HE Yunqi; CHEN Chaochun; HAN Shichuan; LEI Ting; LIN Bingtao

doi:10.11977/j.issn.1004-2474.2023.02.011

Piezoelectrics & Acoustooptics, Volume. 45, Issue 2, 220(2023)

Design and Fabrication of Micro Shell Resonator Gyroscope with High Structure Symmetry

MEI Song^1,2,3, YANG Feng^1,2,3, WEN Lu^1,2,3, LU Yujin^1,2,3, HE Yunqi^1,2,3, CHEN Chaochun^1,2,3, HAN Shichuan^1,2,3, LEI Ting^1,2,3, and LIN Bingtao^1,2,3

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MEI Song, YANG Feng, WEN Lu, LU Yujin, HE Yunqi, CHEN Chaochun, HAN Shichuan, LEI Ting, LIN Bingtao. Design and Fabrication of Micro Shell Resonator Gyroscope with High Structure Symmetry[J]. Piezoelectrics & Acoustooptics, 2023, 45(2): 220

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Paper Information

Received: Nov. 10, 2022

Accepted: --

Published Online: Nov. 29, 2023

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DOI:10.11977/j.issn.1004-2474.2023.02.011

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology