Piezoelectrics & Acoustooptics, Volume. 45, Issue 2, 220(2023)
Design and Fabrication of Micro Shell Resonator Gyroscope with High Structure Symmetry
In response to the demand for high-precision miniaturization of gyroscopes, a micro shell resonator gyroscope (mHRG) structure is designed in this paper. The three-dimensional finite element model is established and the effect of structural symmetry on the gyro performance is investigated. An evaluation method for the roundness of resonator and the asymmetric error of 1-4 order mass is proposed. The process of resonator fabrication is optimized, and the roundness error of the optimized resonator is ≤2 μm, on this basis, a micro shell resonator gyroscope (mHRG) prototype is developed. The performance of the encapsulated mHRG is tested.The results showed the circumference quality factor (Q) distribution is between (9.024-9.183)×105 with a uniformity of ±0.87%.In the force-rebalance mode, the gyroscope range is ±20 (°)/s , the bias instability (Allan deviation) of the gyroscope is 0.013 8 (°)/h, and the angle random walk(ARW) is 0.006 8 (°)/h. This study demonstrates the performance potential of the micro-hemisphere gyros with high structural symmetry.
Get Citation
Copy Citation Text
MEI Song, YANG Feng, WEN Lu, LU Yujin, HE Yunqi, CHEN Chaochun, HAN Shichuan, LEI Ting, LIN Bingtao. Design and Fabrication of Micro Shell Resonator Gyroscope with High Structure Symmetry[J]. Piezoelectrics & Acoustooptics, 2023, 45(2): 220
Received: Nov. 10, 2022
Accepted: --
Published Online: Nov. 29, 2023
The Author Email: