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Acta Optica Sinica, Volume. 42, Issue 7, 0714004(2022)

Surface of Nanosecond Laser Polished Single-Crystal Silicon Improved by Two-Step Laser Irradiation

Yingming Ren1,2 and Zhiyu Zhang1、*
Author Affiliations
  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Article index updated: Mar. 10, 2025

    The article is cited by 5 article(s) CLP online library. (Some content might be in Chinese.)
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    Yingming Ren, Zhiyu Zhang. Surface of Nanosecond Laser Polished Single-Crystal Silicon Improved by Two-Step Laser Irradiation[J]. Acta Optica Sinica, 2022, 42(7): 0714004

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Sep. 2, 2021

    Accepted: Oct. 18, 2021

    Published Online: Mar. 28, 2022

    The Author Email: Zhang Zhiyu (zhangzhiyu@ciomp.ac.cn)

    DOI:10.3788/AOS202242.0714004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology