Chinese Journal of Quantum Electronics, Volume. 42, Issue 4, 450(2025)

Progress on ellipsometry utilizing quantum entangled light sources

Author Affiliations
  • 1CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei 230026, China
  • 2CAS Center for Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei 230026, China
  • 3Xinjiang Key Laboratory of Luminescence Minerals and Optical Functional Materials, Shool of Physics and Electronic Engineering, Xinjiang Normal University, Urumqi 830054, China
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    Ellipsometers are essential tools used to measure the optical properties of samples, such as thin film thickness, optical constants of samples and structural profiles, by measuring the change in polarization state of polarized light before and after passing through the samples, which have wide applications in various fields, including physics, chemistry, materials science, and so on. Currently, the integration of new light sources with ellipsometry to enhance the performance of ellipsometers and expand their application scope is one of the hotspots in related research fields. Due to their unique non-classical properties and high signal-to-noise ratio, quantum entangled light sources have attracted extensive attention in the field of quantum precision measurement. In recent years, research on the principles and applications of quantum ellipsometer, which combines quantum light sources and ellipsometry, has been increasing. The fundamentals and types of classical ellipsometers are reviewed firstly in this paper. Then, based on this, the basic principles and research progress of quantum ellipsometers are mainly introduced, followed with the prospects of their future development direction.

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    . Progress on ellipsometry utilizing quantum entangled light sources[J]. Chinese Journal of Quantum Electronics, 2025, 42(4): 450

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    Paper Information

    Category: Special Issue on...

    Received: Dec. 27, 2024

    Accepted: --

    Published Online: Jul. 31, 2025

    The Author Email:

    DOI:10.3969/j.issn.1007-5461.2025.04.002

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