Optoelectronic Technology, Volume. 40, Issue 4, 298(2020)

Performance and Stability Improvement of Back Channel Etched Indium?Gallium?Zinc Thin?film?transistor by Optimized Passivation Layer

Jiashun TAO and Xiang LIU
Author Affiliations
  • Nanjing CEC Panda FPD Technology Co., Ltd., Nanjing 20033, CHN
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    References(6)

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    [3] [3] J Zhang, LiX F, LuJ G, et al ZhangJ,, X F Li, LiX F, LuJ G, et al ZhangJ,, J G Lu and LiX F, LuJ G, et al ZhangJ,. Performance and stability of amorphous InGaZnO thin film transistors with a designed device structure. Applied Physics Letters. 110(8), 084509-5(2011).

    [5] [5] Xiang Liu, WangLisa Ling, HuHehe, et al LiuXiang,, Lisa Ling Wang, WangLisa Ling, HuHehe, et al LiuXiang,, Hehe Hu and WangLisa Ling, HuHehe, et al LiuXiang,. Performance and stability improvements of back-channel-etched amorphous indium-gallium-zinc thin-film-transistors by CF4+O2 plasma treatment. IEEE Transactions on Electron Devices. 2456034 1-3(2015).

    [6] [6] H H Lu, H, CheTing H, ShihT H, et al LuH, Ting H Che, H, CheTing H, ShihT H, et al LuH, T H Shih and H, CheTing H, ShihT H, et al LuH. 32-inch LCD panel using amorphous Indium-Gallium-Zinc Oxide TFTs. SID Symposium Digest. 1136-1138(2010).

    [7] [7] Y Hanyu, DomenK, NouraK, et al HanyuY,, K Domen, DomenK, NouraK, et al HanyuY,, K Noura and DomenK, NouraK, et al HanyuY,. Hydrogen passivation of electron trap in amorphous In-Ga-Zn-O thin-film transistors. Applied Physics Letters. 103(20), 202114-3(2013).

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    Jiashun TAO, Xiang LIU. Performance and Stability Improvement of Back Channel Etched Indium?Gallium?Zinc Thin?film?transistor by Optimized Passivation Layer[J]. Optoelectronic Technology, 2020, 40(4): 298

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    Paper Information

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    Received: Aug. 28, 2020

    Accepted: --

    Published Online: Jan. 12, 2021

    The Author Email:

    DOI:10.19453/j.cnki.1005-488x.2020.04.011

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