Acta Optica Sinica, Volume. 27, Issue 4, 663(2007)
Simultaneous Phase-Shifting Interferometry Based on Two-Dimension Grating
[1] [1] Peter J. de Groot . Vibration in phase-shifting interferometry[J]. J. Opt. Soc. Am. A, 1995, 12(2): 354~365
[2] [2] Joanna Schmit, Florin Munteanu. Limitations of iterative least squares methods in phase shifting interferometry in the presence of vibrations[C]. Proc SPIE, 2005, 5965: 0z_1~0z_11
[3] [3] James Wyant. Dynamic phase-shifting interferometry beats vibration[C]. SPIE′s Oemagazine, 2005, 5(8): 20~22
[6] [6] R. Smythe, R. Moore. Instantaneous phase measuring interferometry[J]. Opt. Engng., 1984, 23(4): 361~364
[7] [7] Chris L. Koliopoulos. Simultaneous phase shift interferometer[C]. Proc. SPIE, 1991, 1531: 119~127
[8] [8] Andrea Hettwer, Jochen Kranz, Johannes Schwider. Three channel phase-shifting interferometer using polarization-optics and a diffraction grating[J]. Opt. Engng., 2000, 39(4): 960~966
[9] [9] J. E. Millerd, N. J. Brock. Methods and apparatus for splitting, imaging and measuring wavefronts in interferometry[P]. U. S. Patent, 6,304,330, 2001-10-16
[10] [10] J. E. Millerd, N. J. Brock, J. Hayes et al.. Pixelated phase-mask dynamic interferometer[C]. Proc. SPIE, 2004, 5531: 304~314
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese]. Simultaneous Phase-Shifting Interferometry Based on Two-Dimension Grating[J]. Acta Optica Sinica, 2007, 27(4): 663