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Acta Optica Sinica, Volume. 27, Issue 4, 663(2007)

Simultaneous Phase-Shifting Interferometry Based on Two-Dimension Grating

[in Chinese]1,2、*, [in Chinese]1, and [in Chinese]1
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    [in Chinese], [in Chinese], [in Chinese]. Simultaneous Phase-Shifting Interferometry Based on Two-Dimension Grating[J]. Acta Optica Sinica, 2007, 27(4): 663

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 24, 2006

    Accepted: --

    Published Online: Apr. 25, 2007

    The Author Email: (weile_ni@163.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology