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Chinese Journal of Lasers, Volume. 46, Issue 2, 0204001(2019)

Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System

Wentao Zhang1、*, Hao Du1,2, Xianming Xiong1, Renbiao Xie2, and Xianying Wang2
Author Affiliations
  • 1 Guilin University of Electronic Technology, Guilin, Guangxi 541004, China
  • 2 Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai 201203, China
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    Wentao Zhang, Hao Du, Xianming Xiong, Renbiao Xie, Xianying Wang. Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System[J]. Chinese Journal of Lasers, 2019, 46(2): 0204001

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    Paper Information

    Category: measurement and metrology

    Received: Aug. 14, 2018

    Accepted: Oct. 24, 2018

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0204001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology