Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Chinese Journal of Lasers, Volume. 46, Issue 2, 0204001(2019)

Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System

Wentao Zhang1、*, Hao Du1,2, Xianming Xiong1, Renbiao Xie2, and Xianying Wang2
Author Affiliations
  • 1 Guilin University of Electronic Technology, Guilin, Guangxi 541004, China
  • 2 Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai 201203, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (11)
    Equations (0)
    References (0)
    Cited By (1)
    Tools
    Paper Information
    Topics
    Figures & Tables(11)
    Measuring principle of 2D grating system

    Fig. 1. Measuring principle of 2D grating system

    Download full size
    Motion stage servo control system

    Fig. 2. Motion stage servo control system

    Download full size
    Flow chart of simulation

    Fig. 3. Flow chart of simulation

    Download full size
    Structural sketch of simulation platform

    Fig. 4. Structural sketch of simulation platform

    Download full size
    Hardware-in-the-loop simulation platform

    Fig. 5. Hardware-in-the-loop simulation platform

    Download full size
    Schematic of laser beam incident angle

    Fig. 6. Schematic of laser beam incident angle

    Download full size
    Displacement schematic of motion stage

    Fig. 7. Displacement schematic of motion stage

    Download full size
    Model-in-the-loop simulation results. (a) X-axis model error; (b) Y-axis model error; (c) Rz-axis model error

    Fig. 8. Model-in-the-loop simulation results. (a) X-axis model error; (b) Y-axis model error; (c) Rz-axis model error

    Download full size
    Hardware-in-the-loop simulation results. (a) X-axis model error; (b) Y-axis model error; (c) Rz-axis model error

    Fig. 9. Hardware-in-the-loop simulation results. (a) X-axis model error; (b) Y-axis model error; (c) Rz-axis model error

    Download full size
    Comparison of model-in-the-loop and hardware-in-the-loop simulation results. (a) X-axis error; (b) Y-axis error; (c) Rz-axis error

    Fig. 10. Comparison of model-in-the-loop and hardware-in-the-loop simulation results. (a) X-axis error; (b) Y-axis error; (c) Rz-axis error

    Download full size

    • Table 1. Model operation process schedule

      View table

      Table 1. Model operation process schedule

      FunctionTime /μs
      Read raw data16.04
      Measurement model calculation11.31
      Sent position data11.16
      Total time38.51
    Tools

    Get Citation

    Copy Citation Text

    Wentao Zhang, Hao Du, Xianming Xiong, Renbiao Xie, Xianying Wang. Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System[J]. Chinese Journal of Lasers, 2019, 46(2): 0204001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: measurement and metrology

    Received: Aug. 14, 2018

    Accepted: Oct. 24, 2018

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0204001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology