Infrared Technology, Volume. 46, Issue 8, 965(2024)

Optical Constants and Thickness Testing of Films Based on Reflection Spectroscopy

Yonglin LYU1, Wanxiang ZHENG2、*, Rujie LI3, Youliang ZHANG2, Yingjuan TANG2, Weitao ZHANG2, Yijun CHEN4, Guiquan WANG4, Yansheng LI4, and Qiaofang WANG2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • show less
    References(2)

    [8] [8] Jakopic G, Par G, Papoueek W.Unified analytical inversion of reflectometric and ellipsometric data of absorbing media[J]. Appl. Opt., 2000, 39(16): 2727-2732.

    [15] [15] Laaziza Y, Bennouna A, Chadburn N. Optical characterization of low optical thickness thin films from transmittance and back reflectance measurements[J]. Thin Solid Films, 2000, 372: 149-155.

    Tools

    Get Citation

    Copy Citation Text

    LYU Yonglin, ZHENG Wanxiang, LI Rujie, ZHANG Youliang, TANG Yingjuan, ZHANG Weitao, CHEN Yijun, WANG Guiquan, LI Yansheng, WANG Qiaofang. Optical Constants and Thickness Testing of Films Based on Reflection Spectroscopy[J]. Infrared Technology, 2024, 46(8): 965

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jan. 10, 2024

    Accepted: --

    Published Online: Sep. 10, 2024

    The Author Email: Wanxiang ZHENG (1138319556@qq.com。)

    DOI:

    Topics