[1] [1] IVALDI P,ABERGEL J,MATHENY M H,et al.50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection［J］.Journal of Micromechanics and Microengineering,2011,21(8):085023.

[2] [2] LAVRIK N V,SEPANIAK M J,DATSKOS P G.Cantilever transducers as a platform for chemical and biological sensors［J］.Review of Scientific Instruments,2004,75(7):2229-2253.

[3] [3] SINGH A D,PATRIKAR R M.Design and fabrication of PDMS-based electrostatically actuated MEMS cantilever beam［J］.Micro & Nano Letters,2020,15(5):302-307.

[4] [4] RAITERI R,GRATTAROLA M,BUTT H J,et al.Micromechanical cantilever-based biosensors［J］.Sensors and Actuators B:Chemical,2001,79(2):115-126.

[5] [5] BINNIG G,QUATE C F,GERBER C.Atomic force microscope［J］.Physical Review Letters,1986,56(9):930-933.

[6] [6] SHEN D,PARK J H,AJITSARIA J,et al.The design,fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting［J］.Journal of Micromechanics and Microengineering,2008,18(5):055017.

[7] [7] SHEN D N,PARK J H,NOH J H,et al.Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting ［J］.Sensors and Actuators A:Physical,2009,154(1):103-108.

[8] [8] LEE S S,WHITE R M.Self-excited piezoelectric cantilever oscillators［J］.Sensors and Actuators A:Physical,1996,52(1):41-45.

[9] [9] ABDUL B,MASTRONARDI V M,QUALTIERI A,et al.Design,fabrication and characterization of piezoelectric cantilever MEMS for underwater application［J］.Micro and Nano Engineering,2020,7:100050.

[10] [10] SEUNG S L,RIED R P,WHITE R M.Piezoelectric cantilever microphone and microspeaker［J］.Journal of Microelectromechanical Systems,1996,5(4):238-242.

[11] [11] BOISEN A,DOHN S,KELLER S S,et al.Cantilever-like micromechanical sensors［J］.Reports on Progress in Physics,2011,74(3):036101.

[12] [12] YI Zhenxiang,LIAO Xiaoping.A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology［J］.Journal of Micromechanics and Microengineering,2013,23(3):035001.

[13] [13] KWON T,SHIN K S,HYUNG M,et al.Fabrication of piezoelectric thick films for development of micromechanical cantilevers［J］.Journal of Mechanical Science and Technology,2015,29(8):3351-3356.

[14] [14] XIE J,HU M,LING S F,et al.Fabrication and characterization of piezoelectric cantilever for micro transducers［J］.Sensors and Actuators A:Physical,2006,126(1):182-186.

[15] [15] LIU X X,WANG Y X,LE X H,et al.A dual-driving piezoelectric DETF resonator with high quality factor and low multimode effect［J］.Journal of Micromechanics and Microengineering,2018,28(10):105006.

[16] [16] LU J,IKEHARA T,ZHANG Yi,et al.High quality factor silicon cantilever transduced by piezoelectric lead zirconate titanate film for mass sensing applications［J］.Japanese Journal of Applied Physics,2007,46(12):7643-7647.

[17] [17] SHELTON S,CHAN M L,PARK H,et al.CMOS-compatible AlN piezoelectric micromachined ultrasonic transducers［C］//Rome,Italy:IEEE International Ultrasonics Symposium,2009:402-405.

[18] [18] GOERICKE F,MANSUKHANI K,YAMAMOTO K,et al.Experimentally validated aluminum nitride based pressure,temperature and 3-axis acceleration sensors integrated on a single chip［C］//San Francisco,CA,USA:IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS),2014:729-732.

[19] [19] YUAN Y,YANG Q R,LI H L,et al.High quality factor and low motional impedance aluminum nitride tuning fork resonators vibrating in in-plane flexural mode［J］.IEEE Electron Device Letters,2022,43(10):1744-1747.

[20] [20] GORMAN J P.Finite element model of thermoelastic damping in MEMS［D］.Cambridge,MA,USA:Massachusetts Institute of Technology,2002.

[23] [23] QIU H C,ABABNEH A,FEILI D,et al.Analysis of intrinsic damping in vibrating piezoelectric microcantilevers［J］.Microsystem Technologies,2016,22(8):2017-2025.

[24] [24] LIU Z X,CHEN J M,ZOU X D.Modeling the piezoelectric cantilever resonator with different width layers［J］.Sensors,2021,21(1):87.

[25] [25] QIU H C,FEILI D,WU X Z,et al.Resonance-mode effect on piezoelectric microcantilever performance in air,with a focus on the torsional modes［J］.Chinese Physics B,2013,23(2):027701.

[26] [26] FISCHENEDER M,OPOSICH M,SCHNEIDER M,et al.Tuneable Q-factor of MEMS cantilevers with integrated piezoelectric thin films［J］.Sensors,2018,18(11):3842.