Piezoelectrics & Acoustooptics, Volume. 45, Issue 5, 698(2023)
High-Q Piezoelectric-Actuated Aluminum Nitride Based Cantilever Microresonators
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
SHI Shuai, YANG Qingrui, YUAN Yi, LI Haolin, NIU Pengfei, LIU Bohua, ZHANG Menglun. High-Q Piezoelectric-Actuated Aluminum Nitride Based Cantilever Microresonators[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 698
Paper Information
Received: May. 5, 2023
Accepted: --
Published Online: Jan. 6, 2024
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20