In response to the problems of complex processing technique and high cost in the existing piezoelectric-actuated cantilever resonators, this paper proposes a new piezoelectric-actuated cantilever resonator stack structure based on an aluminum nitride support layer, which not only effectively reduces the processing difficulty, but also maintains a high quality factor while miniaturizing the device. The relationship between resonator quality factor and device size design at a fixed frequency is investigated through theoretical analysis, and the effects of different support layer materials on the resonator quality factor are compared. The effect of electrode size design on the performance of resonator in vacuum is investigated experimentally, and the optimum design of piezoelectric-actuated aluminum nitride based cantilever resonator operating in out-of-plane flexural vibration mode is determined. The test results show that the resonator exhibits the best performance when the electrode width ratio is 1 and the length ratio is 2/3, with the quality factor of 7 786, the corresponding resonant frequency of 63.44 kHz, and motion impedance of 66.70 kΩ.