Journal of Semiconductors, Volume. 46, Issue 6, 062501(2025)

2-inch diameter (010) principal-face β-Ga2O3 single crystals grown by EFG method

Xuyang Dong1, Wenxiang Mu1、*, Pei Wang1, Yue Dong1, Hao Zhao1, Boyang Chen1, Zhitai Jia1,2、**, and Xutang Tao1
Author Affiliations
  • 1State Key Laboratory of Crystal Materials, Institute of novel semiconductors, Shandong University, Jinan 250100, China
  • 2Shandong Research Institute of Industrial Technology, Jinan 250100, China
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    Figures & Tables(4)
    (Color online) (a) Schematic diagram of (010) principal-face β-Ga2O3 bulk crystals grown by EFG method. (b) (010) principal-face macro-morphology image of TLDs, showing obvious branching tendency of evolution process with (001) pulling direction from right to left. (c) Enlarged-morphology image of red rectangular block from (b). (d) Micro-morphology image of TLDs of yellow rectangular block in (b). (e) 2-inch diameter (010) principal-face non-TLDs β-Ga2O3 single crystal.
    (Color online) (a) SEM image of (010) principal-face β-Ga2O3 bulk crystals growth cross section at early pulling stage, the bright region with branches is cross-sectional TLDs, enlarged images of (b)−(f) are different location in (a) marked by yellow rectangular block, and the location of (b) is termination point of TLDs, exhibiting destructive effect for crystalline structure of β-Ga2O3 bulk crystals. (g) SEM image of growth cross section at later growth stage of the same bulk crystal, the bright region is cross-sectional TLDs, showing the worse surface morphology than early stage in (a), enlarged images of (h) and (i) are also marked in (g), indicating severe deteriorating scene of TLDs.
    (Color online) (a) XRD pattern and (b) X-ray rocking curve of (010)-oriented substrate from (010) principal-face β-Ga2O3 single crystal. (c) Laue diffraction image, (d) indexation of Laue spots, and (e) identification of (010)-oriented crystallographic plane, manifesting great symmetry and consistency.
    (Color online) (a) UV−VIS−NIR transmittance spectra of (010)-oriented β-Ga2O3, the inset is optical bandgap with 4.4 eV of (010) plane. (b) MWIR transmittance spectra of (010)-oriented β-Ga2O3, showing wide transmission range from UV to MWIR band. (c) Temperature-dependent resistivity of (010)-oriented β-Ga2O3. (d) Fe acceptor activation energy with 0.78 eV was fitted with Arrhenius equation.
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    Xuyang Dong, Wenxiang Mu, Pei Wang, Yue Dong, Hao Zhao, Boyang Chen, Zhitai Jia, Xutang Tao. 2-inch diameter (010) principal-face β-Ga2O3 single crystals grown by EFG method[J]. Journal of Semiconductors, 2025, 46(6): 062501

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    Paper Information

    Category: Research Articles

    Received: Dec. 21, 2024

    Accepted: --

    Published Online: Jun. 30, 2025

    The Author Email: Wenxiang Mu (WXMu), Zhitai Jia (ZTJia)

    DOI:10.1088/1674-4926/24110029

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