Fig. 1. Schematic diagram of the self-designed dual mode quantitative phase microscopic imaging optical path

Fig. 2. Schematic diagram of the self-assembled dual-mode quantitative phase microscopy imaging system

Fig. 3. Quartz standard sample physical display. (a) Physical image of the quartz standard sample;(b) magnification effect of olympus microscope

Fig. 4. Interference result of etching the letter “I” on quartz substrate in transmission mode

Fig. 5. Extraction process of sample phase distribution

Fig. 6. Experimental results of this system in transmission mode. (a) Three-dimensional topography of the letter “I” etched on quartz substrate; (b) statistical graph of the number of pixels corresponding to different surface height values of the sample

Fig. 7. Interference results of deep groove structure on silicon substrate in reflection mode

Fig. 8. Experimental results of the system in reflection mode. (a) Three-dimensional topography of deep groove structure on silicon substrate; (b) statistical graph of the number of pixels corresponding to different surface height values of the sample

Fig. 9. Experimental results of silicon wafer sample obtained by white light interferometer. (a) Surface topography result; (b) section dimension of deep trench structure