Chinese Journal of Lasers, Volume. 52, Issue 11, 1103102(2025)
Properties of Ta2O5 Monolayer Film Based on Ion Source Bias Voltage Regulation
[14] Gangalakurti L, Venugopal Reddy K, Ravi kumar M V Y S et al. Influence of deposition conditions on properties of Ta2O5 films deposited by ion beam sputtering coating technique[J]. ECS Transactions, 107, 3-14(2022).
[16] Kong M D. The research of low-loss absorption in oxide optical coatings[D], 78-95(2019).
[20] Shao S Y. Study of the origin mechanism and controlling method of stress in thin films[D], 8-53(2004).
[23] Zhang D W, Hong R J, Fan S H et al. The effect of ion current density in ion beam assisted deposition[J]. Acta Photonica Sinica, 34, 477-480(2005).
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Lin Wang, Weili Zhang, Ruijin Hong, Kun Wang, Menglei Wang, Qinmin Wang, Hao Liu. Properties of Ta2O5 Monolayer Film Based on Ion Source Bias Voltage Regulation[J]. Chinese Journal of Lasers, 2025, 52(11): 1103102
Category: Thin Films
Received: Jan. 17, 2025
Accepted: Mar. 14, 2025
Published Online: Jun. 9, 2025
The Author Email: Weili Zhang (wlzhang@siom.ac.cn)