Chinese Journal of Lasers, Volume. 52, Issue 11, 1103102(2025)

Properties of Ta2O5 Monolayer Film Based on Ion Source Bias Voltage Regulation

Lin Wang1,2, Weili Zhang1、*, Ruijin Hong2, Kun Wang1, Menglei Wang1, Qinmin Wang1,3, and Hao Liu1,2
Author Affiliations
  • 1Thin Film Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 3School of Materials Science and Engineering, Hunan University, Changsha 410082, Hunan , China
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    References(25)

    [14] Gangalakurti L, Venugopal Reddy K, Ravi kumar M V Y S et al. Influence of deposition conditions on properties of Ta2O5 films deposited by ion beam sputtering coating technique[J]. ECS Transactions, 107, 3-14(2022).

    [16] Kong M D. The research of low-loss absorption in oxide optical coatings[D], 78-95(2019).

    [20] Shao S Y. Study of the origin mechanism and controlling method of stress in thin films[D], 8-53(2004).

    [23] Zhang D W, Hong R J, Fan S H et al. The effect of ion current density in ion beam assisted deposition[J]. Acta Photonica Sinica, 34, 477-480(2005).

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    Lin Wang, Weili Zhang, Ruijin Hong, Kun Wang, Menglei Wang, Qinmin Wang, Hao Liu. Properties of Ta2O5 Monolayer Film Based on Ion Source Bias Voltage Regulation[J]. Chinese Journal of Lasers, 2025, 52(11): 1103102

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    Paper Information

    Category: Thin Films

    Received: Jan. 17, 2025

    Accepted: Mar. 14, 2025

    Published Online: Jun. 9, 2025

    The Author Email: Weili Zhang (wlzhang@siom.ac.cn)

    DOI:10.3788/CJL250475

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