Chinese Journal of Lasers, Volume. 37, Issue 7, 1845(2010)

High Precision Alignment of Phase-Shifting Point Diffraction Interferometer

Liu Ke* and Li Yanqiu
Author Affiliations
  • [in Chinese]
  • show less
    References(14)

    [1] [1] K. Sugisaki,M. Hasegawa,M. Okada et al.. EUVA′s challenges toward 0.1 nm accuracy in EUV at-wavelength interferometry[C]. In Proc. on Fringe 2005,Springer Berlin Heidelberg,2005. 252-266

    [2] [2] H. Medecki,E. Tejnil,K. A. Goldberg et al.. Phase-shifting point diffraction interferometer[J]. Opt. Lett.,1996,21(19):1526-1528

    [3] [3] H. Medecki. Phase-shifting point diffraction interferometer[P]. U.S. Patent 5835217,1998

    [4] [4] P. P. Naulleau,K. A. Goldberg,S. H. Lee. Extreme-ultraviolet phase-shifting point-diffraction interferometer:a wave-front metrology tool with subangstrom reference-wave accuracy[J]. Appl. Opt.,1999,38(35):7252-7263

    [5] [5] K. A. Goldberg,P. P. Naulleau,J. Bokor et al.. Honing the accuracy of extreme ultraviolet optical system testing:at-wavelength and visible-light measurements of the ETS Set-2 projection optic[C]. SPIE,2002,4688:329-337

    [6] [6] K. A. Goldberg,P. P. Naulleau,P. E. Denham et al.. At-wavelength alignment and testing of the 0.3 NA MET optic[J]. J. Vac. Sci. & Technol. B,2004,22(6):2956-2961

    [7] [7] K. A. Goldberg,P. P. Naulleau,J. Bokor. Fourier transform interferometer alignment method[J]. Appl. Opt.,2002,41(22):4477-4483

    [8] [8] K. A. Goldberg,P. P. Naulleau. In situ alignment system for phase-shifting point-diffraction interferometer[P]. U.S. Patent 6118535,2000

    [9] [9] P. P. Naulleau. Phase-shifting point diffraction interferometer focus-aid enhanced mask[P]. U.S. Patent 6151115,2000

    [10] [10] Wu Shaoxiong. Research on phase extraction algorithms of phase-shifting point diffraction interferometer[D]. Beijing:Beijing Institute of Technology,2009

    [11] [11] Zhang Hen. Research on phase unwrapping techniques of phase-shifting point diffraction interferometer[D]. Beijing:Beijing Institute of Technology,2009

    CLP Journals

    [1] Zheng Meng, Li Yanqiu, Liu Ke. Design of Mask for Phase-Shifting Point Diffraction Interferometer[J]. Laser & Optoelectronics Progress, 2013, 50(3): 31201

    [2] Luo Zhiyong, Gu Yingzi, Chen Zhaohui. A Precision Length Measurement Route by Phase-Shifting Inteferometry with Mechanical Scanning[J]. Acta Optica Sinica, 2012, 32(11): 1112004

    [3] Zhang Yu, Jin Chunshui, Ma Dongmei, Wang Liping. Study of Calibrating Algorithm for Wavefront Reference Source of Point Diffraction Interferometer[J]. Chinese Journal of Lasers, 2012, 39(3): 308001

    [4] Zhang Zhenjiu, Hu Hong, Liu Xin. Measurement of Geometric Error of Machine Tool Guideway System Based on Laser Tracker[J]. Chinese Journal of Lasers, 2011, 38(9): 908002

    Tools

    Get Citation

    Copy Citation Text

    Liu Ke, Li Yanqiu. High Precision Alignment of Phase-Shifting Point Diffraction Interferometer[J]. Chinese Journal of Lasers, 2010, 37(7): 1845

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: measurement and metrology

    Received: Nov. 24, 2009

    Accepted: --

    Published Online: Jul. 13, 2010

    The Author Email: Ke Liu (liukess2008@gmail.com)

    DOI:10.3788/cjl20103707.1845

    Topics