Chinese Journal of Lasers, Volume. 37, Issue 7, 1845(2010)
High Precision Alignment of Phase-Shifting Point Diffraction Interferometer
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Liu Ke, Li Yanqiu. High Precision Alignment of Phase-Shifting Point Diffraction Interferometer[J]. Chinese Journal of Lasers, 2010, 37(7): 1845
Paper Information
Category: measurement and metrology
Received: Nov. 24, 2009
Accepted: --
Published Online: Jul. 13, 2010
The Author Email: Ke Liu (liukess2008@gmail.com)
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