Chinese Journal of Lasers, Volume. 16, Issue 1, 59(1989)
Preparation of Ni and NiSi2 films on polysilicon by laser-induced aluminothermic reaction
Tools
Get Citation
Copy Citation Text
Li Ding, Zhou Zhengzhuo, Zheng Yongjian, Gong Huanming, Qiu Μingxin, Lin Chenglu. Preparation of Ni and NiSi2 films on polysilicon by laser-induced aluminothermic reaction[J]. Chinese Journal of Lasers, 1989, 16(1): 59
Paper Information
Category: laser manufacturing
Received: --
Accepted: --
Published Online: Aug. 13, 2012
The Author Email:
CSTR:32186.14.
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20