Chinese Journal of Lasers, Volume. 16, Issue 1, 59(1989)
Preparation of Ni and NiSi2 films on polysilicon by laser-induced aluminothermic reaction
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Li Ding, Zhou Zhengzhuo, Zheng Yongjian, Gong Huanming, Qiu Μingxin, Lin Chenglu. Preparation of Ni and NiSi2 films on polysilicon by laser-induced aluminothermic reaction[J]. Chinese Journal of Lasers, 1989, 16(1): 59
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Category: laser manufacturing
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Published Online: Aug. 13, 2012
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