[2] [2] RAO K S, VASANTHA K, KUMAR P A, et al. Design and of analysis of SPDT ohmic RF MEMS switch ［J］. Microsyst Technol, 2020, 26(5): 1-7.

[5] [5] CIMOL B, JOHANSEN T K, VEGAS OLMOS J J. Microstrip linear phase low pass filter based on defected ground structures for partial response modulation ［J］. Microwave & Opt Technol Lett, 2018, 60(1): 18-25.

[6] [6] HONG J S, MCERLEAN E P, KARYAMAPUD B. Eighteen-pole superconducting CQ filter for future wireless applications ［J］. Microwave Antenn & Propagat IEE Proceed, 2015, 153(2): 205-211.

[9] [9] EKHTERAEI M, HAYATI M, SHAMA F. A compact lowpass filter with ultra-high figure-of-merit for integrating with class-F/F1 power amplifiers ［J］. Analog Integr Circ & Signal Process, 2019, 99(14): 655-667.

[10] [10] GUPTA S C, KUMAR M, MEENA R S. Design & analysis of a microstrip line multi band UWB filter ［J］. AEU - Int J Elec & Commun, 2016, 70(11): 1556-1564.

[11] [11] SARKAR D, MOYRA T, MURMU L. An ultra-wideband (UWB) bandpass filter with complementary split ring resonator for coupling improvement ［J］. AEU - Int J Elec & Commun, 2017, 71(11): 89-95.

[12] [12] BEHZADI K, BAGHELANI M. Bandwidth controlled weakly connected MEMS resonators based narrowband filter ［J］. IFT Digital Library, 2020, 14(8): 1265-1271.

[18] [18] LI M W, LIU Q H, WU Q N, et al. Broadband radio frequency MEMS series contact switch with low insertion loss ［J］.Microsyst Technol, 2019, 25(5): 1619-1625.