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Microelectronics, Volume. 52, Issue 1, 98(2022)

Design of a L-Band Double-Layer Interdigital Linear Phase MEMS Filter

FAN Lina1,2,3,4, WU Qiannan2,3,4,5, ZHANG Shiyi1,2,3,4, HOU Wen1,3,4, and LI Mengwei2,3,6,7
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • 5[in Chinese]
  • 6[in Chinese]
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    FAN Lina, WU Qiannan, ZHANG Shiyi, HOU Wen, LI Mengwei. Design of a L-Band Double-Layer Interdigital Linear Phase MEMS Filter[J]. Microelectronics, 2022, 52(1): 98

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    Received: Aug. 23, 2021

    Accepted: --

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.210322

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology