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Journal of Synthetic Crystals, Volume. 49, Issue 12, 2358(2020)

Process Optimization for Fabrication of Self-Supporting Silicon Nitride Film Structure

WANG Fuxiong1、* and XIE Wanyi2,3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    WANG Fuxiong, XIE Wanyi. Process Optimization for Fabrication of Self-Supporting Silicon Nitride Film Structure[J]. Journal of Synthetic Crystals, 2020, 49(12): 2358

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    Paper Information

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    Received: --

    Accepted: --

    Published Online: Jan. 26, 2021

    The Author Email: WANG Fuxiong (630898488@qq.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology