Fig. 1. Schematics of waveguide. (a) Two-dimensional profile; (b) three-dimensional structure

Fig. 2. Electric field intensity of proposed waveguide. (a) Three-dimensional electric field intensity; (b) two-dimensional electric field intensity (r₁=1 nm, r₂=2 nm); (c) normalized eletric field intensity along the horizontal dashed line in Fig. 2(b); (d) normalized eletric fieldintensity along the vertical dashed line in Fig. 2(b)

Fig. 3. Variations of mode characteristics of proposed waveguide structure with r₁ and r₂.(a) Mode effective index; (b) normalized mode area; (c) confinement factor; (d) propagation length; (e) propagation loss; (f) figure of merit

Fig. 4. Variation of threshold of laser with r₁ and r₂

Fig. 5. Fabrication process for proposed hybrid plasma waveguide structure with air gap

Fig. 6. Two-dimensional profile of waveguide with lateral alignment deviation and two-dimensional electric field distribution of waveguide. (a) Two-dimensional profile of waveguide with lateral alignment deviation, and the deviation of the upper and lower parts is Δx; (b) when alignment Δx=-6 nm, two-dimensional electric field intensity distribution of waveguide (r₁=r₂=10 nm)

Fig. 7. Influences of alignment deviation between the upper and lower parts of waveguide structure on its performance. (a) Influence on mode effective index; (b) influence on normalized mode area; (c) influence on propagation length; (d) influence on confinement factor