Optoelectronic Technology, Volume. 40, Issue 4, 277(2020)

White Light Interference Signal Processing System for Gap Measurement Based on ZYNQ

Xiaoxuan DONG1, Minggang LIU2, Xiangang LUO2, and Ping GAO2
Author Affiliations
  • 1State Key Laboratory of Optical Technologies on Nano?fabrication and Micro?engineering,Chinese Academy of Sciences, Chengdu 60209, CHN
  • 2State Key Laboratory of Optical Technologies on Nano?fabrication and Micro?engineering,Chinese Academy of Sciences, Chengdu 60209, CHN
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    References(2)

    [7] [7] Pengcheng HU, CHANGDi, TANJiubin, et al HUPengcheng,, Di CHANG, CHANGDi, TANJiubin, et al HUPengcheng,, Jiubin TAN and CHANGDi, TANJiubin, et al HUPengcheng,. Displacement measuring grating interferometer: a review. Frontiers of Information Technology & Electronic Engineering. 20(05), 631-655(2019).

    [8] [8] Z Xu, ShilpiekandulaV, Youcef-ToumiK, et al XuZ,, V Shilpiekandula, ShilpiekandulaV, Youcef-ToumiK, et al XuZ,, K Youcef-Toumi and ShilpiekandulaV, Youcef-ToumiK, et al XuZ,. White-light scanning interferometer for absolute nano-scale gap thickness measurement. Optics Express. 17(17), 15104-15117(2009).

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    Xiaoxuan DONG, Minggang LIU, Xiangang LUO, Ping GAO. White Light Interference Signal Processing System for Gap Measurement Based on ZYNQ[J]. Optoelectronic Technology, 2020, 40(4): 277

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    Paper Information

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    Received: Jun. 19, 2020

    Accepted: --

    Published Online: Jan. 12, 2021

    The Author Email:

    DOI:10.19453/j.cnki.1005-488x.2020.04.007

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