Optoelectronic Technology, Volume. 40, Issue 4, 277(2020)
White Light Interference Signal Processing System for Gap Measurement Based on ZYNQ
[7] [7] Pengcheng HU, CHANGDi, TANJiubin, et al HUPengcheng,, Di CHANG, CHANGDi, TANJiubin, et al HUPengcheng,, Jiubin TAN and CHANGDi, TANJiubin, et al HUPengcheng,. Displacement measuring grating interferometer: a review. Frontiers of Information Technology & Electronic Engineering. 20(05), 631-655(2019).
[8] [8] Z Xu, ShilpiekandulaV, Youcef-ToumiK, et al XuZ,, V Shilpiekandula, ShilpiekandulaV, Youcef-ToumiK, et al XuZ,, K Youcef-Toumi and ShilpiekandulaV, Youcef-ToumiK, et al XuZ,. White-light scanning interferometer for absolute nano-scale gap thickness measurement. Optics Express. 17(17), 15104-15117(2009).
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Xiaoxuan DONG, Minggang LIU, Xiangang LUO, Ping GAO. White Light Interference Signal Processing System for Gap Measurement Based on ZYNQ[J]. Optoelectronic Technology, 2020, 40(4): 277
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Received: Jun. 19, 2020
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Published Online: Jan. 12, 2021
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