White Light Interference Signal Processing System for Gap Measurement Based on ZYNQ

Xiaoxuan DONG; Minggang LIU; Xiangang LUO; Ping GAO

doi:10.19453/j.cnki.1005-488x.2020.04.007

Optoelectronic Technology, Volume. 40, Issue 4, 277(2020)

White Light Interference Signal Processing System for Gap Measurement Based on ZYNQ

Xiaoxuan DONG¹, Minggang LIU², Xiangang LUO², and Ping GAO²

¹State Key Laboratory of Optical Technologies on Nano?fabrication and Micro?engineering,Chinese Academy of Sciences, Chengdu 60209, CHN

²State Key Laboratory of Optical Technologies on Nano?fabrication and Micro?engineering,Chinese Academy of Sciences, Chengdu 60209, CHN

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Xiaoxuan DONG, Minggang LIU, Xiangang LUO, Ping GAO. White Light Interference Signal Processing System for Gap Measurement Based on ZYNQ[J]. Optoelectronic Technology, 2020, 40(4): 277

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Received: Jun. 19, 2020

Accepted: --

Published Online: Jan. 12, 2021

The Author Email:

DOI:10.19453/j.cnki.1005-488x.2020.04.007

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology