Electronics and Packaging, Volume. 25, Issue 7, 70107(2025)

Recent Progress in Electroless Plating Process for Metallization of Through Glass Via

SUN Peng1, ZHONG Yi2、*, and YU Daquan2,3
Author Affiliations
  • 1College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 361005, China
  • 2School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China
  • 3Xiamen Sky Semiconductor Technology Co., Ltd., Xiamen 361013, China
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    As Moore's Law gradually approaches its physical limits, the development of electronic devices toward "smaller, thinner, and more precise" dimensions simultaneously imposes higher demands on advanced packaging technologies. Glass substrates have gained significant favor among domestic and foreign enterprises and research institutions due to their advantages, including excellent high-frequency application performance, a flexibly tunable coefficient of thermal expansion (CTE), low cost, and the ready availability of large-size ultra-thin glass substrates. The metallization process, serving as a critical step in through-glass vias (TGVs), determines the electrical connection performance of integrated chips. Currently, TGV metallization is primarily implemented using physical vapor deposition (PVD) technology. However, the high cost, slow deposition rates, and poor effectiveness of PVD in processing high-aspect-ratio blind and through-holes have drawn widespread attention to wet processes for TGV metallization. Addressing this, the deposition mechanism of TGV electroless plating is elaborated upon, recent research advances and key technologies for enhancing adhesion strength between the electroless plated layer and the glass substrate are reviewed, while insights into future development directions are also provided.

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    SUN Peng, ZHONG Yi, YU Daquan. Recent Progress in Electroless Plating Process for Metallization of Through Glass Via[J]. Electronics and Packaging, 2025, 25(7): 70107

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    Paper Information

    Category:

    Received: May. 2, 2025

    Accepted: Aug. 26, 2025

    Published Online: Aug. 26, 2025

    The Author Email: ZHONG Yi (zhongyi@xmu.edu.cn)

    DOI:10.16257/j.cnki.1681-1070.2025.0158

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