Lithium niobate electro-optical modulator based on ion-cut wafer scale heterogeneous bonding on patterned SOI wafers

Zhuoyun Li; Yang Chen; Shuxiao Wang; Fan Xu; Qiang Xu; Jianmin Zhang; Qiannan Zhu; Wencheng Yue; Xin Ou; Yan Cai; Mingbin Yu

doi:10.1364/PRJ.534954

Photonics Research, Volume. 13, Issue 1, 106(2025)

Lithium niobate electro-optical modulator based on ion-cut wafer scale heterogeneous bonding on patterned SOI wafers

Zhuoyun Li1...2, Yang Chen1, Shuxiao Wang1, Fan Xu3, Qiang Xu4, Jianmin Zhang1,2, Qiannan Zhu1,2, Wencheng Yue1, Xin Ou1,6,*, Yan Cai1,4,7,*, and Mingbin Yu45 |Show fewer author(s)

Author Affiliations

¹State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

²University of Chinese Academy of Sciences, Beijing 100049, China

³School of Microelectronics, Shanghai University, Shanghai 201800, China

⁴Shanghai Industrial μTechnology Research Institute, Shanghai 201800, China

⁵Shanghai Mingkun Semiconductor Co., Ltd., Shanghai 201800, China

⁶e-mail: ouxin@mail.sim.ac.cn

⁷e-mail: yan.cai@mail.sim.ac.cn

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Zhuoyun Li, Yang Chen, Shuxiao Wang, Fan Xu, Qiang Xu, Jianmin Zhang, Qiannan Zhu, Wencheng Yue, Xin Ou, Yan Cai, Mingbin Yu, "Lithium niobate electro-optical modulator based on ion-cut wafer scale heterogeneous bonding on patterned SOI wafers," Photonics Res. 13, 106 (2025)

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