Researching | Measurement of Two-Dimensional Orthogonal Gratings Using Grazing-Incidence Small-Angle X-Ray Scattering

Acta Optica Sinica, Volume. 44, Issue 11, 1134001(2024)

Measurement of Two-Dimensional Orthogonal Gratings Using Grazing-Incidence Small-Angle X-Ray Scattering

Tong Fang^1,2, Chenglong Wang³, and Hong Yu^1,2,3、*

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, Zhejiang, China

³Zhangjiang Laboratory, Shanghai 201210, China

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References(36)

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Tong Fang, Chenglong Wang, Hong Yu. Measurement of Two-Dimensional Orthogonal Gratings Using Grazing-Incidence Small-Angle X-Ray Scattering[J]. Acta Optica Sinica, 2024, 44(11): 1134001

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Paper Information

Category: X-Ray Optics

Received: Mar. 11, 2024

Accepted: Apr. 11, 2024

Published Online: Jun. 12, 2024

The Author Email: Yu Hong (yuhong@zjlab.ac.cn)

DOI:10.3788/AOS240719

CSTR:32393.14.AOS240719

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology