Measurement of Two-Dimensional Orthogonal Gratings Using Grazing-Incidence Small-Angle X-Ray Scattering

Tong Fang; Chenglong Wang; Hong Yu

doi:10.3788/AOS240719

Acta Optica Sinica, Volume. 44, Issue 11, 1134001(2024)

Measurement of Two-Dimensional Orthogonal Gratings Using Grazing-Incidence Small-Angle X-Ray Scattering

Tong Fang^1,2, Chenglong Wang³, and Hong Yu^1,2,3、*

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, Zhejiang, China

³Zhangjiang Laboratory, Shanghai 201210, China

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Figures & Tables(8)

Fig. 1. Schematic diagram of GISAXS

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Fig. 2. Two-dimensional (2D) orthogonal grating in real space and reciprocal space. (a) Distribution of grating in real space; (b) distribution of Bragg rods in reciprocal space; (c) reciprocal space transformation after grating rotation

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Fig. 3. Reconstruction process diagram of 2D orthogonal gratings using GISAXS

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Fig. 4. Parametric model of sample particles and GISAXS patterns. (a) Three-dimentional (3D) model (a1), cross-sectional model along x-direction (a2), and cross-sectional model along y-direction (a3) of sample; (b) GISAXS patterns at different rotation angles

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Fig. 5. Scattering data of different Bragg orders

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Fig. 6. Reconstruction result of sample where ground truth is depicted by lines and GISAXS measurement results are indicated by dots

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Table 1. Nanostructure parameters of 2D orthogonal grating
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Table 1. Nanostructure parameters of 2D orthogonal grating
Parameter Value
$D_{x}^{0 - 5}$ 29 28 30 34 36 41
$D_{y}^{0 - 5}$ 31 30 32 36 38 43
$T_{x}^{0 - 5}$ 0 0.5 1.5 0.75 $-$ 1 $-$ 2
$T_{y}^{0 - 5}$ 0 $-$ 1 $-$ 1.5 $-$ 0.5 0 2

Table 2. Bounds of structural parameters in reconstruction process
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Table 2. Bounds of structural parameters in reconstruction process
Parameter $D_{x}^{0 - 5}$ $D_{y}^{0 - 5}$ $T_{x}^{0 - 5}$ $T_{y}^{0 - 5}$ $D_{w}$
Bound [20, 50] [20, 50] [ $-$ 5, 5] [ $-$ 5, 5] [0, 5]

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Tong Fang, Chenglong Wang, Hong Yu. Measurement of Two-Dimensional Orthogonal Gratings Using Grazing-Incidence Small-Angle X-Ray Scattering[J]. Acta Optica Sinica, 2024, 44(11): 1134001

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