Chinese Journal of Lasers, Volume. 17, Issue s1, 164(1990)
Laser chemical vapor deposition of amorphous silicon
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Yuan Jiayong, Chen Yuqing, Chen Zhengji, Zhao Fangyi, Wang Ying. Laser chemical vapor deposition of amorphous silicon[J]. Chinese Journal of Lasers, 1990, 17(s1): 164
Paper Information
Category: materials and thin films
Received: Nov. 2, 1989
Accepted: --
Published Online: Oct. 12, 2012
The Author Email:
CSTR:32186.14.
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