Chinese Journal of Lasers, Volume. 17, Issue s1, 164(1990)
Laser chemical vapor deposition of amorphous silicon
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
Yuan Jiayong, Chen Yuqing, Chen Zhengji, Zhao Fangyi, Wang Ying. Laser chemical vapor deposition of amorphous silicon[J]. Chinese Journal of Lasers, 1990, 17(s1): 164
Paper Information
Category: materials and thin films
Received: Nov. 2, 1989
Accepted: --
Published Online: Oct. 12, 2012
The Author Email:
CSTR:32186.14.
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20