Fig. 1. Schematic layout of the full-field microscope at the SSRF BL13W1 beamline.

Fig. 2. Beam shaper compared with FZP.

Fig. 3. Three kinds of sample illumination modes: (a) normal incidence with fine structure of sample 2Δr, (b) normal incidence with fine structure of sample Δr, and (c) inclined incidence with fine structure of sample Δr.

Fig. 4. Schematic layout of the image magnification system.

Fig. 5. Picture for the experimental setup: (a) the overall microscope, and (b) the nano-imaging system.

Fig. 6. Sample illumination system: (a) focused spot of beam shaper and its three-dimensional intensity profile, and (b) hollow spot after the beam stop and its three-dimensional intensity profile.

Fig. 7. Image of the Siemens star by the developed microscope: (a) the overall image of the target, (b) the intensity profile of the radial bar at the 500 nm zone, (c) enlarged image of the inner part of the target, and (d) the intensity profile of the radial bar at the 100 nm zone.