Acta Optica Sinica, Volume. 32, Issue 11, 1116001(2012)
Magnetic-Medium Assistant Polishing of Silicon Modification Layer on Silicon Carbide Surface
[1] [1] M. A. Ealey, G. Q. Weaver. Development history and trends for reaction bonded silicon carbide mirrors [C]. SPIE, 1996, 2856: 66~72
[3] [3] Zhang Ge, Zhao Rucheng, Zhao Wenxing. Study on fabrication technology of reaction bonded silicon carbide mirror blank for space [J]. Chin. J. Space Sci., 2011, 31(3): 401~405
[4] [4] Fan Di, Zhang Zongyu, Niu Haiyan et al.. Surfacing fabrication of silicon carbide optical mirror [J]. J. Chinese Ceramic Society, 2003, 31(11): 1096~1100
[6] [6] Zhang Feng, Xu Lingdi, Fan Di et al.. Fabrication of surface modification aspheric SiC mirror [J]. Optics & Precision Engineering, 2008, 16(12): 2479~2484
[7] [7] Ma Zhanlong, Liu Jian, Wang Junlin. Development and application of ultra-smooth optical surface polishing technology [J]. Laser & Optoelectronics Progress, 2011, 48(8): 082202
[8] [8] Donald Golini, William I. Kordonski, Paul Dumas et al.. Magnetorheological finishing (MRF) in commercial precision optics manufacturing [C]. SPIE, 1999, 3782: 80~91
[9] [9] Kang Guiwen, Zhang Feihu. Surface shape control in optics manufacturing using magnetorheological finishing[J]. Diamond & Abrasives Engineering, 2010, 30(5): 77~82
[10] [10] Liu Haishan. Study and Application of Magnetic Abrasive Finishing [D].Shandong: Shandong University of Technology, 2008
[11] [11] Wang Xuyue, Wu Yongbo, Jiang Jian et al.. MPT development and polishing characteristics test [J]. J. Dalian University of Technology, 2006, 46(6): 832~836
[14] [14] Zhang Feng, Zhang Xuejun. Foundation of mathmatics model of magnetorheological finishing [J]. Optical Technique, 2000, 26(2): 190~192
[15] [15] Jessica E. DeGroote, Anne E. Marino, John P. Wilson et al.. Removal rate model for magnetorheological finishing of glass [J]. Appl. Opt., 2007, 46(32): 7927~7941
[16] [16] Deng Weijie, Zheng Ligong et al.. Dwell time algorithm based on matrix algebra and regularization method [J]. Optics & Precision Engineering, 2007, 7(7): 1009~1015
Get Citation
Copy Citation Text
Zhang Feng, Deng Weijie. Magnetic-Medium Assistant Polishing of Silicon Modification Layer on Silicon Carbide Surface[J]. Acta Optica Sinica, 2012, 32(11): 1116001
Category: Materials
Received: May. 21, 2012
Accepted: --
Published Online: Sep. 14, 2012
The Author Email: Zhang Feng (zhangfjy@yahoo.com)