Acta Optica Sinica, Volume. 32, Issue 11, 1116001(2012)
Magnetic-Medium Assistant Polishing of Silicon Modification Layer on Silicon Carbide Surface
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Zhang Feng, Deng Weijie. Magnetic-Medium Assistant Polishing of Silicon Modification Layer on Silicon Carbide Surface[J]. Acta Optica Sinica, 2012, 32(11): 1116001
Paper Information
Category: Materials
Received: May. 21, 2012
Accepted: --
Published Online: Sep. 14, 2012
The Author Email: Zhang Feng (zhangfjy@yahoo.com)
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