Phase-change memory (PCM)-based neuromorphic devices can be considered to provide a promising solution to break the separation between computing and storage units, which is imposed by the von Neumann architecture based computing systems[
Journal of Semiconductors, Volume. 45, Issue 7, 072303(2024)
Dual-phase coexistence enables to alleviate resistance drift in phase-change films
The amorphous phase-change materials with spontaneous structural relaxation leads to the resistance drift with the time for phase-change neuron synaptic devices. Here, we modify the phase change properties of the conventional Ge2Sb2Te5 (GST) material by introducing an SnS phase. It is found that the resistance drift coefficient of SnS-doped GST was decreased from 0.06 to 0.01. It can be proposed that the origin originates from the precipitation of GST nanocrystals accompanied by the precipitation of SnS crystals compared to single-phase GST compound systems. We also found that the decrease in resistance drift can be attributed to the narrowed bandgap from 0.65 to 0.43 eV after SnS-doping. Thus, this study reveals the quantitative relationship between the resistance drift and the band gap and proposes a new idea for alleviating the resistance drift by composition optimization, which is of great significance for finding a promising phase change material.
Introduction
Phase-change memory (PCM)-based neuromorphic devices can be considered to provide a promising solution to break the separation between computing and storage units, which is imposed by the von Neumann architecture based computing systems[
Exhibiting stable resistivity in the amorphous state is a necessary property for multi-level PCM[
As reported[
Experimental
Pure GST, SnS, and SnS-doped GST thin films with about 140 nm thickness were directly deposited on SiO2/Si (100) and quartz substrates by magnetron sputtering method (Kurt J. Lesker PVD 75). First, the substrate temperature was kept at room temperature. In each run of the experiment, the base and working pressures in the chamber were set to be 5 × 10−4 and 0.4 Pa, respectively. The Ar gas flow was set to 47.6 mL/min. Then, we set direct current power for SnS target from 0 to 20 W to adjust SnS-doping concentration, and fix radio frequency power for GST target at 50 W. The as-deposited films were annealed in a rapid-vacuum oven with N2 atmosphere at 350 °C for 10 min.
The composition of as-deposited samples can be determined by energy dispersive spectroscopy (EDS). The structure was characterized by X-ray diffraction (XRD). The diffraction patterns were taken in the 2θ range of 10°−60° using Cu Kα radiation with a wavelength of 0.154 nm. The transmission spectra of the thin films in the 800−2500 nm spectral range were obtained using a Perkin−Elmer Lambda 950 ultraviolet/visible/near-infrared spectrometer spectrophotometer. A piece of SiO2 glass with the same thickness as the substrate was used as the reference material for calculating absorption in the thin films. The sheet resistances of as-deposited films as a function of elevated temperature (non-isothermal) and as a function of time at specific temperatures (isothermal) were in situ measured using a four-point probe in a homemade vacuum chamber. The confocal Raman scattering spectra were recorded at room temperature by using a Renishaw inVia type microscopic Raman spectrometer with a laser at a wavelength of 785 nm.
Result and discussion
Figure 1.(Color online) (a) Relationship between sheet resistance and annealing temperature at heating rate of 30 °C/min. (b) Plot of failure time versus reciprocal temperature and (c) sheet resistance as a function of time for SnS-doped GST films at 50 °C for up to 103 s.
On the other hand, a power-law equation with time can be used to characterize the local resistance drift of amorphous phase-change materials by[
Here R0 and t0 are constants which have a dependence on the initial state of materials. R and ν is the test resistance and the resistance drift coefficient, respectively. The time dependent drift of the amorphous resistance of GST and SnS-doped GST thin films at 50 °C is shown in
The origin of the amorphous resistance drift can be ascribed to the variation in optical band gap, which can be characterized by using the well-known Tauc’s equation[
Here Eopt, B and hv is the optical band gap, a constant which depends on the transition probability and incident photon energy, respectively.
Figure 2.(Color online) (a) Plot of (αhν)1/2 vs. hν for pure GST and SnS-doped GST samples. (b) Relationship between electrical conductivity and the reciprocal temperature for amorphous GST and SnS-doped GST films.
Here σ0, kB, Eσ and T is a temperature-independent constant, the Boltzmann constant, the electrical conduction activation energy and the absolute temperature, respectively. From the plot of lnσ versus 103/T, the Eσ can be obtained based on the slope (Eσ/kB) of the plot. The obtained Eσ values are plotted in
The comparison of the Eopt and Eσ for all the studied films strongly suggests that the activation energy of conductivity is linear proportional to the band gap and inversely proportional to the resistance drift. The conduction activation energy increases, the band gap also increases, but the resistance drift becomes larger. Therefore, in order to significantly reduce the resistance drift, it is necessary to further reduce the band gap.
In order to evaluate the fundamental phase-change properties in dependence of crystallization, we investigate the amorphous and crystalline structures of the SnS-doped GST thin films by XRD patterns in
Figure 3.(Color online) X-ray diffraction patterns of as-deposited and annealed (a) (SnS)8.8(GST)91.2, (b) (SnS)35.1(GST)64.9, and (c) (SnS)54.6(GST)45.4 films.
To confirm further the dual-phase coexistence in SnS-GST thin films, Raman spectra of SnS and SnS-GST films annealed at 200 and 350 °C was measured as shown in
Figure 4.(Color online) Raman scattering spectra of as-deposited and annealed (a) pure SnS, (b) (SnS)8.8(GST)91.2, (c) (SnS)35.1(GST)64.9, and (d) (SnS)54.6(GST)45.4, respectively.
Conclusions
The electrical, optical and structural properties of pure GST and SnS-doped GST films have been investigated systematically. The results show that the addition of SnS into the GST films leads to a smaller electrical activation energy and narrower band gap, which directly causes the decrease in resistance drift. Indeed, the drift coefficient was reduced from 0.06 for GST to 0.01 for SnS-doped GST thin films. Moreover, X-ray diffraction patterns and Raman spectra reveal that the improvement amorphous thermal stability in SnS-doped GST films originates from the formation of dual-phase coexistence behavior in amorphous SnS-dopd GST thin films. This helps to alleviate resistance drift in amorphous phase-change materials for phase-change memory application.
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Tong Wu, Chen Chen, Jinyi Zhu, Guoxiang Wang, Shixun Dai. Dual-phase coexistence enables to alleviate resistance drift in phase-change films[J]. Journal of Semiconductors, 2024, 45(7): 072303
Category: Articles
Received: Apr. 9, 2024
Accepted: --
Published Online: Jul. 18, 2024
The Author Email: Guoxiang Wang (GXWang)