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Acta Optica Sinica, Volume. 36, Issue 8, 811003(2016)

Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask

Shen Lina1,2,3、*, Wang Xiangzhao1,2, Li Sikun1,2, Yan Guanyong4, Zhu Boer1,2, Meng Zejiang1,2, and Zhang Heng1,2
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  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    Shen Lina, Wang Xiangzhao, Li Sikun, Yan Guanyong, Zhu Boer, Meng Zejiang, Zhang Heng. Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask[J]. Acta Optica Sinica, 2016, 36(8): 811003

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    Paper Information

    Category: Imaging Systems

    Received: Jan. 28, 2016

    Accepted: --

    Published Online: Aug. 18, 2016

    The Author Email: Shen Lina (shenlina@siom.ac.cn)

    DOI:10.3788/aos201636.0811003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology